Single-monolayer SiNx embedded in TiN: A first-principles study
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چکیده
منابع مشابه
New understanding of hardening mechanism of TiN/SiNx-based nanocomposite films
In order to clarify the controversies of hardening mechanism for TiN/SiNx-based nanocomposite films, the microstructure and hardness for TiN/SiNx and TiAlN/SiNx nanocomposite films with different Si content were studied. With the increase of Si content, the crystallization degree for two series of films firstly increases and then decreases. The microstructural observations suggest that when SiN...
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